Applications
Scientific Industry Quality control Aerospace & Defense			Semiconductor Microscopy & Biomedical Synchroton
HASO	Number of microlenses	Accuracy/Dynamic	Spectral range	Frame rate (Hz)	Interface
FIRST	32 x 40	λ/100 400λ	Mono (±50) from 400 - 1100 nm	60	FireWire
32	32 x 40	λ/100 520λ	R1 or R2	50	FireWire
42	42 x 52	λ/100 600λ	R1	50	FireWire
76-GE	76 x 100	λ/100 1200λ	R1 or R2	17	Giga Ethernet
128-GE	128 x 128	λ/100 1500λ	R1 or R2	7.5	Giga Ethernet
FAST-GE	15 x 15	λ/100 120λ	R1	950	Giga Ethernet
WSR 32	32 x 40;	λ/100 520λ	400 - 800 nm or 532 - 1064 nm	50	FireWire
WSR 58-GE	58 x 74	λ/100 1000λ	400 - 800 nm or 532 - 1064 nm	17	Giga Ethernet
HP-GE	30 x 30	λ/1000 250λ	405nm ;	7.5	Giga Ethernet
NIR	32 x 40	λ/35 400λ	1500 - 1600 nm	60	FireWire
UV	50 x 50	λ/75 2000λ	193 - 300 nm	20	CamLink
λEUV	51 x 51	λ/100 5000λ	7 - 25 nm (50-200 eV)	0.5	PCI board
λX	75 x 75	λ/10 5000λ	0.3 - 1 nm (1 - 4keV)	0.5	PCI board
X	0.7 x 1.0	0.1nm - 10µm	8 - 15keV	60	FireWire

R1 = range 400-600nm/500-700nm/650-900nm/800-1100nm. R2 = extended range 400-700nm/500-900nm/650-1100nm

Using only one program, you can measure phase and intensity independently, reconstruct the wavefront by either zonal or modal methods, examine the spot diagram in detail, or use the PSF and Strehl ratio to get detailed information on the beam focalization.

Each user can customize the HASO v3 screen layout, report formats and data files to include, exclude or highlight the requested informations.

• Ultra short wavelength beam characterization, adjustment and alignment
• Adaptive optics and automatic beam alignment
• EUV lithography

SL-Sys™ neo for precision miniature optic testing. SL-Sys neo enables to characterize small optical components (diameter up to 12mm). It will measure the wavefront, the focal length, the chromaticism @ 532/630nm, the MTF @ 532nm, the relative illumination, the curvature.

Fully automated wavefront characterization of high NA miniature optics from 1-12mm.

• Precision wavefront characterization
• BFL, EFL, chromatism, field curvature, distortion, vignetting, relative illumination
• 3D and through-focus MTF

• Principle & History of Shack-Hartmann Wavefront sensor


• Theoritical optical aberrations and their outcomes by G Yoon


• Using your HASO with a beam profiler - In this application note, we discuss the utility and limitations of beam profilers and why HASO is the ideal complement.